Круглые поликристаллические силиконовые вафли P N IC 4 8 12 дюймов/полупроводниковые

MATERIAL PROPERTIES

PROPERTY

SPECIFICATION A

REFERENCED STANDARD A

GROWTH METHOD

CZ

CRYSTAL ORIENTATION

<100>±2º

ASTM F26

DONOR TYPE

P/boron

ASTM F42

OXYGEN CONCERTRATION

≤1.0x10¹⁸ atoms/cm3

ASTM F1188  measured on center

CRABON CONCENTRATION

≤5.0x10¹⁶ atoms/cm3

ASTM F1391 measured on center of slug

DISLOCATION DENSITY

≤3000pcs/cm3

ASTM F47-88 measured on slug in ingot tail

ELECTRICAL PROPERTIES

RESISITIVITY

1.0-3.0ohm-cm

ASTM F43

LIFETIME

≥10us

≥10us

GEOMETRY

GEOMETRY

SQUARE

THICKNESS

180um±20um

ASTM F533/EDGE 6MM 4, CENTER 1

TTV

≤30um

ASTM F567/EDGE 6MM 4, CENTER 1

DIMENSION

156±0.5um

SAW MARKS

depth≤15um, depth≤15um

ASTM F567

SURFACE QUALITY

Cleaned, no grease stains

Profilometer/sj-210

EDGE CHIPPING

depth≤0.3mm,length≤0.5mm

By sight

INDENTATION

Depth≤0.3um, length≤0.5mm, no V shape cave, total≤2

By sight

BOW

<40um

Astm f657;by non-contact capacitive

ROUGHNESS(RA)

<1.0um

Profilometer/sj-210

PACKAGE AND LABELS

PACKAGE

400PCS/PACKAGE

100PCS/BAG

LABELS

PART NO. P.O. NO. NO OF WAFER, DIMENSION

TEMP, HUMIDITY