Кварцевые распылители высокой степени очистки Sio2 кварцевое

Sio2 sputtering targets

Purity

                 Conta Containing sio2 from 99.95%-99.9999%

Category

Grain, wafer, disc, panel, plate, ring, block

Characteristics

High pure; low air bubble density; low impurity content

Special features

Great categories; big dimension design can be fulfilled

Purposes

For the coating, semiconductor, optics, environment protection, new energy resource industries

NAME

UNIT ×10-4%

Al 

Fe 

Ca 

Mg 

Yi 

Cu 

Mn 

Ni 

pb 

Sn 

Cr 

B 

K 

Na 

Li 

OH 

Fused Quartz 

16 

0.92 

1.5 

0.4 

1.0 

0.01 

0.05 

<0.3

<0.3

<0.3

<0.3 

0.2 

1.49 

1.67 

<0.3 

400 

Synthetic Fused 

Silica 

0.37 

0.31 

0.27 

0.04 

0.03 

0.03 

0.01 

<0.03

<0.03

<0.03

<0.03 

0.02 

0.5 

0.5 

<0.3 

1200 

Infrared Optical 

Quartz 

35 

1.45 

2.68 

1.32 

1.06 

0.22 

0.07 

<0.03

<0.03

<0.03

<0.03 

0.3 

2.2 

3 

<0.3 

5 

Mechanical Property

Reference Value

Mechanical Property

Reference Value

Density

2.203g/cm3

Refractive Index

1.45845

Compressive Strength

>1100Mpa

Coefficient of thermal expansion

5.5×10^-7cm/cm.°C

Bending Strength

67Mpa

Hot work temperature

1750~2050°C

Tensile Strength

48.3Mpa

The temperature for a short time

1300°C

Poisson's Ratio

0.14~0.17

The temperature for a long time

1100°C

Elastic Modulus

71700Mpa

Resistivity

7×107Ω.cm

Shearing Modulus

31000Mpa

Dielectric Strength

250~400Kv/cm

Moths Hardness

5.3~6.5

(Moths Scale)

Dielectric Constant

3.7~3.9

Deformation Point

1280°C

Dielectric absorption coefficient

4×10⁴

Specific Heat(20~350°C)

670J/kg °C

Dielectric loss coefficient

1×10⁴

Thermal Conductivity(20°C)

1.4W/m °C

Typical Mechanical Property of Fused Quartz